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Mechanically Compliant High Contrast Grating Mirrors for Radiation Pressure Cooling

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Abstract

We have developed micromechanical membranes with high reflectivity and low mass for optical cooling. By patterning silicon nitride membranes with grating structures we have achieved reflectivity of R = 99% and a quality factor of Q = 1.6 × 104.

© 2011 Optical Society of America

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