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25 GHz soliton microcombs in high-Q Si3N4 racetrack-shaped microresonators

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Abstract

We demonstrate a 25 GHz single-soliton comb on a Si3N4 platform fabricated using a novel subtractive method. A long cavity is carefully designed to fit within the e-beam writing field while minimizing coupling to higher-order modes.

© 2020 The Author(s)

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