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Conferences > CLEO_QELS > 2018 > FF1E > FF1E.1

Silicon nitride-based deep sub-λ slit for ultra-broadband THz coherent detection

Alessandro Tomasino, Riccardo Piccoli, Yoann Jestin, Alessandro Busacca, Sebastien Delprat, Mohamed Chaker, Marco Peccianti, Matteo Clerici, Luca Razzari, and Roberto Morandotti

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Abstract

We report on the characterization of a new type of CMOS-compatible device for terahertz solid-state biased coherent detection, which relies on a 1-µm-wide metallic slit embedded in a thin film of PECVD-grown silicon nitride.

© 2018 The Author(s)

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