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Etch-tuning and Design of SiN Photonic Crystal Reflectors

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Abstract

We tune a freestanding photonic crystal reflector resonance to within 0.15 nm (0.04 linewidths) of 1550 nm using iterative hydrofluoric acid etches, and provide design considerations for creating reflectors robust against beam collimation.

© 2017 Optical Society of America

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