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Deep-subwavelength Si core plasmonic waveguide monolithically integrated with Si photonic waveguide

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Abstract

A plasmonic waveguide with a deep-subwavelength Si core is integrated with a Si photonic waveguide. By utilizing horizontal Al-Si-Al structure, we obtained a 4-dB/μm propagation loss with a 60×60 nm2 surface-oxidized Si core.

© 2016 Optical Society of America

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