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Nanostructured Transparent Conducting Oxide Films for Polarization Control with Plasmonic Metasurfaces

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Abstract

Transparent Conducting Oxides (TCOs) enable the realization of practical plasmonic and metamaterial devices at the telecommunication frequency due to their low optical loss and CMOS compatibility. By employing a conventional dry-etching process, we have fabricated GZO plasmonic waveplates, which convert linearly polarized light into circularly polarized light.

© 2014 Optical Society of America

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