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We demonstrate a high-efficiency, photon-number resolving transition edge sensor, integrated on an optical silica waveguide structure. The detector consists of three individual absorber/sensor devices providing a total system detection efficiency of up to 93% for single photons at a wavelength of 1551.9 nm. This new design enables high fidelity detection of quantum information processes in on-chip platforms.
© 2013 Optical Society of America
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