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Conferences > CLEO_QELS > 2013 > JW2A > JW2A.61

Precise Measurement of High-Speed Vibration Displacement Using Triangle-Wave Phase Modulation

Yosuke Tanaka, Naoyuki Miyata, and Takashi Kurokawa

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Abstract

We propose a measurement system for high-speed vibration displacement using an interferometer with triangle-wave phase modulation. Displacement less than ±45 nm by 1-MHz vibration is proved measurable within a standard deviation of 1.5 nm.

© 2013 Optical Society of America

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