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  • 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper ck_8_6

Silicon Microcavity in the Visible Range Enabled by Curved Slotted Micromirrors

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Abstract

Optical micro cavities have become an essential building block for diverse on-chip and off-chip systems including medical imaging, spectroscopy, silicon photonics and cavity quantum electrodynamics [1-3]. Most of the technologies presented in literature impose limitations on the cavity bandwidth of operation. The need for an ultra-wide band operation, spanning from the visible range to the infrared range (IR), as well as reliable spectral performance has motivated the development of microcavities using deeply-etched slotted mirror [4-5].

© 2019 IEEE

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