Abstract
Direct laser writing (DLW) is a powerful tool toward the development of ultimate three-dimensional (3D) photonic devices. Because of the increasing demand for realising nano-geometries, the diffraction-limited resolution associated with DLW should be overcome to access the nanoscale. To meet this challenge, the concept of 3D nano printing, which is called super-resolution photoinduction-inhibition nanolithography (SPIN) [1-3], has been developed and this new technology enables us to break the diffraction barrier that has governed the optical instruments for over 140 years. The application of this technology in the optical data storage has allowed for the development of photonic big data storage with Petabyte capacity disks [4–7].
© 2017 IEEE
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