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Conferences > CLEO_Europe > 2017 > CM_5 > CM_5_2
  • 2017 European Conference on Lasers and Electro-Optics and European Quantum Electronics Conference
  • (Optica Publishing Group, 2017),
  • paper CM_5_2

Combination of additive and subtractive laser microprocessing in glass/polymer microsystems for chemical sensing applications

Titas Tičkūnas, Matthieu Perrenoud, Simas Butkus, Sima Rekštytė, Mangirdas Malinauskas, Domas Paipulas, Roaldas Gadonas, Yves Bellouard, and Valdas Sirutkaitis

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Abstract

The fabrication of a novel 3D polymer/glass micromechanical sensor concept is demonstrated by combining two femtosecond laser direct writing processes: laser exposure and chemical etching of glass combined with two-photon polymerization.

© 2017 IEEE

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