Abstract

Femtosecond laser systems are the enabling technology for cold ablation, a process that removes layers of material with virtually no thermal side-effects, and therefore leads to a superior quality without additional post-processing steps [1,2]. Cold ablation can be applied to even the most complex and hardest to machine materials, like diamond, ceramics, polymers and metals, making the femtosecond laser system a universal tool for micromachining. However, in order to achieve high throughput, high pulse energies at high repetition rates, and therefore high average output power, is required [3].

© 2017 IEEE