Abstract
Thin-film-based LiNbO3 components have been experiencing an increasing success over the past decade due to their potentiality to enhance electro-optical (EO) or nonlinear (NL) effects [1,2]. Therefore, their production at low cost is becoming a major challenge. In [3,4], we proposed a precise-dicing-based technique for the low-cost production of confined LiNbO3 waveguides with integrated Spot-Size-Converters, and we achieved a four-time reduction of the driving power while keeping insertion losses lower than 3 dB. Here we go one step further by proposing free-standing electro-optical micro and nanostructures in sub-micrometer-thin layers of LiNbO3. We also employ an Optical-Coherence-Tomography (OCT)-based characterization method to evaluate the birefringence, group velocity, propagation losses, and electro-optical sensitivity of the membranes.
© 2017 IEEE
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