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Conferences > CLEO_Europe > 2015 > CM_P > CM_P_18
  • 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference
  • (Optica Publishing Group, 2015),
  • paper CM_P_18

Mathematical Model of Nonlinear Laser Lithography

Ö. Yavuz, E. Ergecen, O. Tokel, I. Pavlov, and F. Ö. Ilday

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Abstract

Laser induced periodic surface structures (LIPSS) had been observed just five years after the invention of laser [1]. Among the numerous LIPSS techniques none of them could maintain long-range order [2]. However, it has recently been demonstrated that long order periodic surface structures can be produced using nonlinear laser lithography (NLL) [3]. Here, we present a mathematical foundation for NLL.

© 2015 IEEE

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