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  • 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference
  • (Optica Publishing Group, 2015),
  • paper CD_11_4

High-Resolution Sub-Surface Microscopy of CMOS Integrated Circuits Using Radially Polarized Light

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Abstract

The best imaging resolutions of CMOS integrated circuits to date are provided by combining solid-immersion lens (SIL) imaging [1] and two-photon optical-beam-induced current (TOBIC) microscopy [2]. In principle, the performance can be further improved using radially polarized (RP) beams [3], which can be focused to a tighter spot in high-NA microscopes. Here we show how a twisted-nematic liquid-crystal radial polarization converter (RPC) can generate a high quality RP beam [4] to provide sub-100-nm sub-surface imaging resolutions.

© 2015 IEEE

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