Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • CLEO/Europe and EQEC 2011 Conference Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2011),
  • paper CM_P6

Nanostructuring of Silicon Surface with Near-Field Enhanced in Femtosecond Laser Ablation

Not Accessible

Your library or personal account may give you access

Abstract

Intense ultrashort laser pulses are able to produce periodic nanostructures through ultrafast ablation of solid surfaces, where the observed size of nanostructures is much smaller than the laser wavelength [1,2]. Intensive studies have been made for a variety of target materials to elucidate the nanostructuring. However, the physical process is not completely understood yet. Based on a series of experimental studies for hard thin films such diamond-like carbon and TiN [2,3], we have shown that near-field enhanced with femtosecond (fs) laser pulses plays the essential role in initiating the nanoscale ablation on the target surface [4], and the origin of nano-periodicity observed can be attributed to the excitation of surface plasmon polaritons (SPPs) in the surface layer [5] where the dielectric properties are rapidly changed due to the generation of high-density free electrons.

© 2011 Optical Society of America

PDF Article
More Like This
Nanostructure formation on Silicon suboxide with plasmonic near‐ field ablation induced by femtosecond laser pulses

Tatsutoshi Takaya, Godai Miyaji, Lukas Janos Richter, and Jürgen Ihlemann
cm_2_4 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2019

Role of Multiple Shots of Femtosecond Laser Pulses in Periodic Nanostructure Formation on Silicon Surface

G. Miyaji and K. Miyazaki
CM_4_4 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2013

Femtosecond Laser Ablation from Silicon and Ripples Formation: Evolution of Surface Excitation

Mourad Bounhalli, Marco Muth, Olga Varlamova, and Juergen Reif
CM4_5 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2011

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved