Abstract

Ultrashort laser material processing is a versatile technology that allows material structuring at nanometer scales [1]. In the context of the fabrication of nanofluidics components or photonics crystals, high aspect ratio nanochannel in dielectrics is required. Deep nano-craters have been produced with single shot from gaussian beams by taking advantage of geometrical aberrations and nonlinear propagation to elongate the beam focus [2]. However, the distortion of gaussian beams during nonlinear propagation in dielectrics produces irregular structures with strongly interdependant channel diameter and length.

© 2011 Optical Society of America