Abstract
Numerous techniques to fabricate optical waveguides in LiNbO3 have been reported, which include Li2O out-diffusion, metal in-diffusion, ion exchange, proton exchange [1,2], strain induced waveguides [3], ion implantation/irradiation, using the photo-refractive effect and ultrafast or UV laser writing [4]. We have recently reported a technique to surface machine LiNbO3 - Etching During the Indiffusion of Ti (EDIT) [5], where one X-cut sample is prepared with a patterned film of titanium. This is then placed in contact with another unprocessed X-cut sample and the pair is annealed in a wet oxygen atmosphere. After annealing, the originally unpatterned wafer is etched corresponding to the Ti patterns on the other wafer. In this work, we report on the observation of waveguiding in LiNbO3 that has been EDIT patterned.
© 2011 Optical Society of America
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