Abstract

Turning or corner mirrors can be used to redirected light on an integrated chip, providing a route to higher density of optical components. Mirrors have been demonstrated in silicon-on-insulator with losses of 0.9dB [1] and in hollow waveguides with losses of 0.8dB [2]. We demonstrate an alternative method of fabricating mirrors on a silica-on-silicon substrate. The method employs the complimentary techniques of physical micromachining and direct UV writing, both provide rapid prototyping outside the cleanroom environment.

© 2011 Optical Society of America