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  • CLEO/Europe and EQEC 2009 Conference Digest
  • (Optica Publishing Group, 2009),
  • paper CM6_3

Micro bump formation on preheated BK7-glass by excimer laser irradiation

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Abstract

Bump-like surface elevations on transparent materials are interesting candidates for substrate-integrated micro lenses. Whereas in polymer material rather small humps [1] as well as several μm high micro lenses [2] could be obtained, the induced elevations on glass achieved by CO2-lasers [3], femtosecond lasers [4] and excimer lasers [5] exhibit heights of less than 100 nm.

© 2009 IEEE

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