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  • CLEO/Europe and EQEC 2009 Conference Digest
  • (Optica Publishing Group, 2009),
  • paper CM3_4

Short Pulse Laser Shock Microforming of Thin Metal MEMS Components

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Abstract

Laser Shock Micro-Forming (LSμF) is intended as a non-thermal laser forming method using the shock wave induced by laser irradiation to modify the curvature of microscopic scale components [1,2]. It has the advantages of laser thermal forming (non-contact, tool-free and high efficiency and precision) [3,4], but its non-thermal character allows the preservation or even improvement of material properties through the induction of compressive residual stress over the target surface, a feature enabling an improved resistance of shaped metal to resist corrosion and fatigue.

© 2009 IEEE

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