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Conferences > CLEO_Europe > 2009 > CK > CK_P1
  • CLEO/Europe and EQEC 2009 Conference Digest
  • (Optica Publishing Group, 2009),
  • paper CK_P1

Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot micro cavities in Al2O3

F. Ay, J. D. B. Bradley, K. Wörhoff, R. M. de Ridder, and M. Pollnau

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Abstract

Focused ion beam (FIB) milling is an emerging technology that enables fast, reliable and well-controlled nanometer-size feature definition. Since the method involves physical removal of material by a beam of ions, the technique can be adapted and optimized almost for any material system.

© 2009 IEEE

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