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Conferences > CLEO_Europe > 2009 > CE > CE_P19
  • CLEO/Europe and EQEC 2009 Conference Digest
  • (Optica Publishing Group, 2009),
  • paper CE_P19

A PSQ-L polymer microring resonator fabricated by a simple UV-based soft-lithography process

Jie Teng, Stijn Scheerlinck, Geert Morthier, and Roel Baets

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Abstract

Photonic integrated circuits based on polymer waveguides have great potential to reduce cost due to simple fabrication processes. Apart from conventional lithography and etching, the fabrication process for the waveguides can be simplified by using soft-lithography [ 1, 2] or nanoimprint lithography (NIL) [3 ].

© 2009 IEEE

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