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Optica Publishing Group
  • CLEO/Europe and EQEC 2009 Conference Digest
  • (Optica Publishing Group, 2009),
  • paper CE4_4

Microfluidic channels fabricated by femtosecond laser irradiation and chemical etching for optofluidic devices

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Abstract

In the field of organic optoelectronics, optofluidic approach is gaining importance to take advantage of useful properties of polymers in solutions. In tune with it, many researchers are moving from fundamental research in cuvettes to original geometries like microfluidic channels for device applications [1]. Microfluidic channels and patterns can be fashioned by lithographic and chemical-etching techniques, but these approaches are primarily limited to the fabrication of two-dimensional patterns on the surface. In order to create a true 3-D structure several layers of glass substrates need to be patterned, etched and fused together. A relatively new technique of Femtosecond Laser Irradiation and Chemical Etching (FLICE) can add nuance to these fabrication approaches and, thereby, permit the development of directly buried microchannels with various aspect ratios. As this is a maskless technology, it enables rapid prototyping of new devices. Moreover, since the same femtosecond laser can be used to produce low loss optical waveguides [2], these femtosecond laser based technologies could become one-stop solution for fabrication of microfluidic channels and their integration with optical circuits [3].

© 2009 IEEE

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