MEMS technology has seen increasing integration into applications and systems involving optics and photonics. Examples of such systems and applications have included optical communications, optical displays, optical microscopy, optical sensors, opto-fluidics. The incorporation of MEMS into optical/photonic systems has the benefit of reducing cost, size, weight and electrical power consumption of such systems, with the added potential of introducing new concepts and functionalities.

© 2009 IEEE

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