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Optica Publishing Group
  • CLEO/Europe and IQEC 2007 Conference Digest
  • (Optica Publishing Group, 2007),
  • paper CH4_4

Presision measurements of weak forces and small mechanical deformations with the adaptive holographic interferometer

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Abstract

A rapid development of micro- and nano-sized optomechanic and optoelectronic components (so-called MEMS-like components) requires the development of affordable experimental techniques for high precision measurements of weak pressures (up to 10−8–10−10 N/m2) as well as small mechanical deformations (up to a few picometers) caused by these pressures.

© 2007 IEEE

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