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Optica Publishing Group
  • CLEO/Europe and IQEC 2007 Conference Digest
  • (Optica Publishing Group, 2007),
  • paper CE_1

Novel Fabrication Technique of Proton-exchanged Waveguide Based on LiNbO3 Using Inductively Coupled Plasma

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Abstract

Lithium Niobate is an important ferroelectric crystal with a variety of optical and acoustical applications. Protonexchange technique has been widely used to fabricate waveguides in LiNbO3. But conventional methods by melting acids readily attacked some susceptible Y-cut LiNbO3 substrates. The inductively coupled plasma technique is able to ionize H2 gas with a high ionization rate, making it a useful tool for proton-exchanged waveguide fabrication. In our novel process, high ICP source power was used in order to generate high density hydrogen plasmas. The samples were placed on the lower electrode set at a process temperature (See Fig. 1), and a small RF power was applied to the lower electrode to generate the necessary self bias voltage attracting the H+ ions onto the surface of the sample.

© 2007 IEEE

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