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Conferences > CLEO_AT > 2021 > JW1A > JW1A.182

Phononic integrated circuitry with an etchless fabrication process

Ziyao Feng, Yang Liu, Lai Wang, and Xiankai Sun

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Abstract

We proposed, theoretically analyzed, and experimentally demonstrated a new type of phononic integrated waveguides, which can be fabricated with an etchless process, for guiding and routing gigahertz mechanical waves on a chip.

© 2021 The Author(s)

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