Membrane-based optomechanical accelerometry

Aman R. Agrawal; Aman R. Agrawal; Mitul Dey Chowdhury; Mitul Dey Chowdhury; Christian M. Pluchar; Christian M. Pluchar; Dalziel Wilson; Dalziel Wilson

doi:10.1364/CLEO_AT.2021.JTu2I.3

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2021),
paper JTu2I.3
•https://doi.org/10.1364/CLEO_AT.2021.JTu2I.3

Membrane-based optomechanical accelerometry

Aman R. Agrawal, Mitul Dey Chowdhury, Christian M. Pluchar, and Dalziel Wilson

CLEO: Applications and Technology 2021

San Jose, California United States
9–14 May 2021
ISBN: 978-1-943580-91-0

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Symposium- Micro-Photonic Positioning, Navigation and Timing II (JTu2I)

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A. R. Agrawal, M. D. Chowdhury, C. M. Pluchar, and D. Wilson, "Membrane-based optomechanical accelerometry," in Conference on Lasers and Electro-Optics, J. Kang, S. Tomasulo, I. Ilev, D. Müller, N. Litchinitser, S. Polyakov, V. Podolskiy, J. Nunn, C. Dorrer, T. Fortier, Q. Gan, and C. Saraceno, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper JTu2I.3.

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Abstract

Optomechanical accelerometers promise quantum-limited readout, high band- width, self-calibration, and radiation-pressure stabilization. We present a simple, scalable platform that enables these benefits with sub-µg sensitivity and 10 kHz bandwidth, based on a pair of vertically integrated SiN membranes.

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