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Conferences > CLEO_AT > 2021 > JTh3A > JTh3A.43

Ultra-Sensitive, Real-Time Detection of HCl Using a Transportable NICE-OHMS System

E. Anne Curtis, Nicola C. G. Black, Gregory S. Walsh, Chris G. Lucas, and Geoffrey P. Barwood

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Abstract

We report the development of a portable NICE-OHMS device with the aim of ultra-sensitive (<1 nmol/mol), real-time (<1 min) detection of HCl and monitoring of water vapor for applications in microelectronic fabrication cleanrooms.

© 2021 The Author(s)

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