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Demonstration of Tunable High Q Aluminum Nitride on Sapphire Microring Resonator at Green and UV Wavelengths

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Abstract

We demonstrate aluminum nitride on sapphire microring resonators at green and ultraviolet wavelength and measured record high quality factors of 147,000 at 532nm and 25,500 at 369.5nm based on thermo optic-effect.

© 2021 The Author(s)

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