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Conferences > CLEO_AT > 2020 > AW4I > AW4I.2

GHz femtosecond ablation: efficiency and quality aspects

G. Bonamis, K. Mishchik, E. Audouard, E. Mottay, C. Honninger, J. Lopez, and I. Manek-Honninger

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Abstract

GHz femtosecond ablation results in high specific removal rates. The efficiency increase can be explained by combined non-thermal and thermal contributions in the laser-matter interaction. We study the impact of the efficiency gain on the obtained processing quality.

© 2020 The Author(s)

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