GaN μLED Arrays in Parylene C Substrate for Flexible Implantable Optogenetics: Fabrication and Modeling

Jay W. Reddy; Ibrahim Kimukin; Luke T. Stewart; Zabir Ahmed; Alison L. Barth; Elias Towe; Maysamreza Chamanzar

doi:10.1364/CLEO_AT.2020.ATh3K.5

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2020),
paper ATh3K.5
•https://doi.org/10.1364/CLEO_AT.2020.ATh3K.5

GaN μLED Arrays in Parylene C Substrate for Flexible Implantable Optogenetics: Fabrication and Modeling

Jay W. Reddy, Ibrahim Kimukin, Luke T. Stewart, Zabir Ahmed, Alison L. Barth, Elias Towe, and Maysamreza Chamanzar

CLEO: Applications and Technology 2020

Washington, DC United States
10–15 May 2020
ISBN: 978-1-943580-76-7

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Light Sources for Biomedical Applications (ATh3K)

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J. W. Reddy, I. Kimukin, L. T. Stewart, Z. Ahmed, A. L. Barth, E. Towe, and M. Chamanzar, "GaN μLED Arrays in Parylene C Substrate for Flexible Implantable Optogenetics: Fabrication and Modeling," in Conference on Lasers and Electro-Optics, OSA Technical Digest (Optica Publishing Group, 2020), paper ATh3K.5.

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Abstract

Optoelectronic neural probes with (22 pm x 22 pm) Gallium-Nitride pLED arrays (up to 32 devices) on a Parylene C substrate are fabricated and analyzed using thermal and optical modeling to identify thermally-safe stimulation parameters.

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