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Conferences > CLEO_AT > 2020 > AF3M > AF3M.7

Large-field step-structure surface profilometry using a femtosecond laser

Yue Wang, Guangyao Xu, Shilin Xiong, and Guanhao Wu

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Abstract

We present a femtosecond laser based interferometer for step-structure surface measurement. The synthetic-wavelength method is adopted to bridge the envelope positioning and carrier phase extraction methods. A three step surface is precisely reconstructed.

© 2020 The Author(s)

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