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Conferences > CLEO_AT > 2020 > AF2I > AF2I.2

Gradual Modulation of Semiconductor Properties via Grayscale Processing

Sara Kacmoli, Carlo Holly, and Claire F. Gmachl

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Abstract

We demonstrate a novel method of inducing a gradual change in semiconductor conductivity by combining grayscale processing of photoresist and proton implantation. This method is flexible and lends itself to many applications in semiconductor-based optical and electrical devices.

© 2020 The Author(s)

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