The motion of a microresonator integrated in a silicon hemisphere Fabry-Perot microcavity is used to transduce acceleration. We present the prototype assembly and performance tests of the optomechanical accelerometer.

© 2019 The Author(s)

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription