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Additive Fabrication of Multiscale Metasurface by Electrohydrodynamic Nanotexturing of Two-Beam Interference-Patterned Photopolymer Surface

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Abstract

Adding nanotextures to polymer surfaces already corrugated by 2-beam interference lithography is highly challenging. Using softlithography, triboelectricity, and electrohydrodynamic lithography, we fabricate multiscale metasurfaces by adding nanovolcanoes to sinusoidally corrugated NOA73 surfaces.

© 2019 The Author(s)

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