Narrow-linewidth ArF excimer laser with high efficiency

Yuanyuan Fan; Xingliang Song; Jiangshan Zhao; Yi Zhou

doi:10.1364/CLEO_AT.2017.JTh5A.5

Conference on Lasers and Electro-Optics
OSA Technical Digest (online) (Optica Publishing Group, 2017),
paper JTh5A.5
•https://doi.org/10.1364/CLEO_AT.2017.JTh5A.5

Narrow-linewidth ArF excimer laser with high efficiency

Yuanyuan Fan, Xingliang Song, Jiangshan Zhao, and Yi Zhou

CLEO: Applications and Technology 2017

San Jose, California United States
14–19 May 2017
ISBN: 978-1-943580-27-9

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Postdeadline Papers Session I (JTh5A)

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Y. Fan, X. Song, J. Zhao, and Y. Zhou, "Narrow-linewidth ArF excimer laser with high efficiency," in Conference on Lasers and Electro-Optics, OSA Technical Digest (online) (Optica Publishing Group, 2017), paper JTh5A.5.

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Abstract

A narrow-linewidth ArF excimer laser using a compound cavity with two oscillators but the same discharge chamber is developed. Methods for the locking of narrowband laser modes in long cavity length and insufficient mode competition are introduced.

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