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Conferences > CLEO_AT > 2017 > ATu1A > ATu1A.2

Integrated Sensor based on a-Si:H Photodiodes and Diffused Glass Waveguides for Biomedical Applications

G. de Cesare, R. Asquini, A. Buzzin, A. d’Alessandro, A. Nascetti, and D. Caputo

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Abstract

We present the design and fabrication of an evanescent waveguide sensor based on a-Si:H photodiodes for biomedical applications. The complete device presents a noise level lower than 2fA and a responsivity of 300mA/W at 532nm.

© 2017 Optical Society of America

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