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Silicon Nitride on Silicon-on-Insulator: a Platform for Integration Active Control over Passive Components

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Abstract

We propose the use of SOI with silicon nitride layers for electronic control. A phase modulator with a Vπ·L of 1.02 V∙mm and a compact vertical coupling taper are demonstrated in an easy-to-fabricate planar structure.

© 2016 Optical Society of America

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Poster Presentation

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