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Conferences > CLEO_AT > 2016 > JTh2A > JTh2A.6

High-sensitive Thermoreflectance Measurement for Multi-layered Semiconductor Devices using Multi-spectral Thermoreflectance Microscopy

Dong Uk Kim, Kwan Seob Park, Chan Bae Jeong, Geon Hee Kim, and Ki Soo Chang

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Abstract

In this study, we have proposed a multi-spectral thermoreflectance microscopy system which has a systematic approach for high-sensitive thermoreflectance measurement for multi-layered semiconductor devices.

© 2016 Optical Society of America

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