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Conferences > CLEO_AT > 2016 > ATu3J > ATu3J.4

High-sensitive Optical Detection of Fine Particulate Defects by Autonomous Searching Liquid Probe: Observation of Dynamic Interaction with Defects

Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, and Satoru Takahashi

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Abstract

There are high demands for inspecting several tens nm scales defects on bare wafer surface today. Then we suggest new optical inspection method using volatile liquid. It enables to improve sensitivity of particulate defects inspection.

© 2016 Optical Society of America

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