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Conferences > CLEO_AT > 2016 > ATh1K > ATh1K.3

Spatial shaping of femtosecond laser pulses for improved micromachining efficiency

Reece N. Oosterbeek, Simon Ashforth, Owen Bodley, and M. Cather Simpson

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Abstract

We quantify the efficiency of femtosecond micromachining of quartz and silicon as a function of the spatial beam shape (Bessel, vortex, Gaussian). A > 15-fold range of ablation thresholds was observed. Incubation effects were significant.

© 2016 Optical Society of America

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