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A chip-scale sub-μg/Hz1/2 optomechanical DC accelerometer at the thermodynamical limit

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Abstract

Here we report a record solid-state optomechanical oscillator for acceleration detection down to the thermodynamical limit, at 730 ng/Hz1/2 resolution and 193 ng/Hz sensitivity, through optical pumping and RF readout of the radiation-pressure-driven backaction oscillation.

© 2016 Optical Society of America

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