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Conferences > CLEO_AT > 2015 > ATh1K > ATh1K.5

Depolarization Sensitive Optical Inspection of Semiconductor Integrated Circuits

A. Yurt, M. D. W. Grogan, M. S. Ünlü, and B. B. Goldberg

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Abstract

We demonstrate dark-field, through-silicon imaging of semiconductor integrated circuits by exploiting depolarization-sensitive, high aperture angle reflectivity.

© 2015 Optical Society of America

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