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Conferences > CLEO_AT > 2014 > AM2L > AM2L.1

15 mW of CW emission at 193 nm using the crystal KBBF

Matthias Scholz, Dmitrijs Opalevs, Jürgen Stuhler, Patrick Leisching, Wilhelm Kaenders, Guiling Wang, Xiaoyang Wang, Rukang Li, and Chuangtian Chen

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Abstract

We report on a narrow-band continuous-wave laser source in the deep-ultraviolet with an output power of > 15 mW at 193 nm. We see applications of this laser source in semiconductor metrology and high-resolution spectroscopy.

© 2014 Optical Society of America

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