Abstract
We propose a measurement system for high-speed vibration displacement using an interferometer with triangle-wave phase modulation. Displacement less than ±45 nm by 1-MHz vibration is proved measurable within a standard deviation of 1.5 nm.
© 2013 Optical Society of America
PDF ArticleMore Like This
Naoyuki Miyata, Yosuke Tanaka, and Takashi Kurokawa
ThF1_2 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2013
Yosuke Tanaka, Takamasa Ito, Ryosuke Kimura, Koki Tsuchiya, and Takashi Kurokawa
JTu5A.143 CLEO: Applications and Technology (CLEO:A&T) 2016
Yosuke Tanaka, Naoyuki Miyata, Takamasa Ito, and Takashi Kurokawa
JTu4A.53 CLEO: Applications and Technology (CLEO:A&T) 2014