Abstract

We demonstrate a 3D photonic technology for fabrication of double-layer silicon waveguides in standard silicon. This technology eliminates the need for silicon-on-insulator (SOI) wafers and can be further expanded to multiple-layer photonics for different applications.

© 2013 Optical Society of America

PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription