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High-Q Mid-Infrared Chalcogenide Glass-On-Silicon Resonators for Spectroscopic Chemical Sensing

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Abstract

We fabricated and characterized high-index-contrast As2Se3 micro-disk resonators on silicon with a record loaded Q-factor of 105 at 5.2 μm wavelength. On-chip chemical sensing using cavity-enhanced infrared spectroscopy was demonstrated using the micro-disk device.

© 2013 Optical Society of America

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