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Silicon-on-sapphire waveguides design for mid-IR evanescent field absorption gas sensors

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Abstract

We investigate three types of SOS waveguides suitable for evanescent field absorption based gas sensing in mid-IR. Rib and slot waveguide shows greater quasi-TE evanescent field than strip waveguide. 1.33ppm resolution is achievable.

© 2012 Optical Society of America

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